Hitachi Cable, Ltd. hereby announces that it has developed a new
mass-production technology for GaN-templates (Fig. 1), in which a
high-quality gallium nitride (GaN) single-crystal thin film is grown on a
sapphire substrate, and it will start selling these templates.
Using this product as a base substrate for an epitaxial wafer for
white LEDs (hereinafter referred to as "epiwafer for white LED
epiwafers") makes it possible to drastically improve productivity of
white LED epiwafers and the LED properties. Therefore, this product is
expected to become an effective solution to improve the position of
white LED manufacturers in the industry, where there is severe
competition.
The demand for white LEDs is rapidly expanding and they have come to be
used in backlight unit in liquid crystal displays (LCDs) and ordinary
lighting devices in recent years thanks to their energy efficiency and
long service life. The structure of an white LED epiwafer consists of a
thin active layer and a p-type GaN layer with a total thickness of about
1µm over an n-type GaN layer with a thickness of about 10µm, grown on a
sapphire substrate (Fig. 2). All these crystal layers are produced by
the MOVPE method *1 in ordinary manufacturing processes. The MOVPE
method is suitable for growing active layers which require atomic-level
control of the film thickness. Meanwhile, a disadvantage of this method
is that it takes a long time to grow a high-quality and thick n-type GaN
layer. White LED epiwafers can be grown about once or twice a day at
the most, and thus there is a need for a high-efficiency production
method.
Fig. 1 Cross-section of GaN-template Fig. 2 Cross-section of the epiwafer for white LEDs
To solve this problem, Hitachi Cable developed a GaN-template used as a base substrate for growth in the MOVPE method.
The GaN template consists of an n-type GaN layer grown on a sapphire
substrate. Using a GaN-template means LED manufacturers do not need to
grow an n-type GaN buffer layer and this reduces the time required for
growth by about half compared with conventional methods. The
GaN-templates of Hitachi Cable are also suitable for high-output LEDs
which require large currents because they allow both low resistance and
high crystal formation.
MOVPE SEQUENCE USING GaN
Hitachi Cable has developed single-crystal free-standing GaN
substrates used for blue-violet lasers and developed unique HVPE-growth
*2 technology and machines for mass-production of GaN substreates. Based
on this technology, Hitachi Cable developed new high-efficiency
production technology and machines for mass-production of high-quality
GaN-templates. The main characteristics of the GaN-template are as
follows.
Main characteristics of GaN-template
- High crystal quality and high surface quality based on growth
technology established in the development of free-standing GaN
substrates
- Low resistance n-type GaN buffer which is suitable for high-output wafers and bonding-type LEDs*3
- Templates on flat-surface sapphire substrates and various types of PSS *4 are available
- Wafers with 2 to 6 inches in diameters are available(8-inch version is now planned for development)
- GaN TEMPLATE
With this new GaN-template added to the lineup of GaN substrates and GaN
epiwafers that it has been selling, Hitachi Cable will strengthen and
expand its GaN product group and offer compound semiconductor products
which respond to the various needs of clients.
Panel exhibits of GaN-templates will be presented at an exhibition
hosted by CS Mantech (an international conference for manufacturing
technology of compound semiconductor) to be held in New Orleans in the
United States from May 13 to 16.